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Generalized predictive control of temperature on an atomic layer deposition reactor
- He, Wen-Jie, Zhang, Hai-Tao, Chen, Zhiyong, Chu, Bo, Cao, Kun, Shan, Bin, Chen, Rong
- He, Wen-Jie, Zhang, Hai-Tao, Chen, Zhiyong, Lin, Ji-Long, Tian, Kan, Shan, Bin, Chen, Rong
- Wang, Jian, Wu, Jingjing, Agrez, Michael, Niu, Jun, Hong, Jianguo, Chen, Rong, Xu, Kesen, Niu, Weibo, Peng, Cheng, Liu, Enyu, Wang, Jiayong, Liu, Song
- Peng, Cheng, Liu, Xiangqun, Agrez, Michael, Niu, Jun, Liu, Enyu, Xu, Kesen, Niu, Weibo, Chen, Rong, Wang, Jiayong, Zhang, Zhaoyang, Lin, Pengfei, Wang, Jian
- Wang, Jiayong, Zhang, Zhaoyang, Chen, Rong, Agrez, Michael, Niu, Jun, Xu, Kesen, Sun, Xiaohui, Yang, Guangyun, Niu, Weibo, Liu, Enyu, Peng, Cheng, Lin, Pengfei, Wang, Jian
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